Handbook of Plasma Processing Technology: Fundamental, Etching, Deposition and Surface Interactions (Materials Science and Process Technology) by Stephen M. Rossnagel (PDF)

Description

This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

User’s Reviews

Opiniones editoriales Review “The text provides and excellent reference for plasma processing.” – SAMPE Journal Review This is a comprehensive overview of the technology of plasma-based processing, written by an outstanding group of 29 contributors.

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