Ebook Info
- Published: 1998
- Number of pages: 282 pages
- Format: PDF
- File Size: 7.92 MB
- Authors: S.M. Metev
Description
An introduction to the principles and techniques of laser-assisted microtechnology with emphasis on micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The experimental and theoretical physico-chemical basis of every technological process is presented. On the basis of some characteristic examples of applications, the capabilities of the technological methods as well as the optimum conditions for their realization are discussed. In this second edition, besides the actualization of the literature, a new chapter has been added on the laser-assisted wet chemical micro-etching. This is a new method for direct 3-D micro-structuring of solids, with a number of potential applications.
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